Comparitive analysis of capacitive type MEMS pressure sensor for altitude sensing

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Maniraman, P. and Chitra, L. (2014) Comparitive analysis of capacitive type MEMS pressure sensor for altitude sensing. In: 2014 IEEE National Conference On Emerging Trends In New & Renewable Energy Sources And Energy Management (NCET NRES EM), Chennai, India.

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Abstract

This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are discussed. Also a new design is proposed to overcome the demerits of capacitive sensor. © 2020 Elsevier B.V., All rights reserved.

Item Type: Conference or Workshop Item (Paper)
Subjects: Engineering > Electrical and Electronic Engineering
Divisions: Engineering and Technology > Aarupadai Veedu Institute of Technology, Chennai > Electrical & Electronics Engineering
Depositing User: Unnamed user with email techsupport@mosys.org
Last Modified: 10 Dec 2025 06:54
URI: https://vmuir.mosys.org/id/eprint/4229

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