Enhancement of reliability and sensitivity plays a vital role in Micro-Electro-Mechanical Systems (MEMS) technology, and it can be done very effectively by reducing the failures (through minimization) of such kind of systems. As it is a much known fact that using micro fabrication technique product development is not so easy because of its high cost and such facilities are not available everywhere. In this research work the primary focus is to know about the trust-worthiness of MEMS based devices by designing and performance analysis through simulation in multiphysics environment. The main outcome of this work is to model a novel device with high reliability as well as sensitivity which are very useful for healthcare monitoring and related applications in different environments. Through literature survey several reliability problems like stiction, fractural defects, immobilization, structural instability and many more has been noticed and possible solutions has been investigated which has been tested and analyzed in multiphysics environment. In this paper several micro-shapes and micro- structures has been designed and tested using different sensing materials but end of the result it has been found that microcantilever arrays are more useful and simple. Apart from this it has been also noticed that microcantilever has high reliability and sensitivity, it has been compared by applying some pressure to achieve maximum displacement. So, this research work is recommending microcantilever array sensor for different health care applications because of its high sensitivity, selectivity, high reliability, simplicity and versatility with different medium. © 2022 Elsevier B.V., All rights reserved.